I want to have a figure with subfigures like this:
I tried to use \usepackage{subfig} but I get an error: ! Package subcaption Error: This package can't be used in cooperation(subcaption) with the subfig package.
Something like the following? The code uses the subcaption package, which may (or may not) be compatible with the document class you use. Which document class do you use?
\documentclass[demo]{article} % remove 'demo' option in real document
\usepackage{graphicx}
\usepackage[labelformat=simple]{subcaption}
\renewcommand\thesubfigure{\alph{subfigure})}
\begin{document}
\begin{figure}
\begin{minipage}{0.6\textwidth}
\begin{subfigure}{0.45\textwidth}
\includegraphics[width=\linewidth]{first}
\caption{}
\end{subfigure}
\hfill
\begin{subfigure}{0.45\textwidth}
\includegraphics[width=\linewidth]{second}
\caption{}
\end{subfigure}
\bigskip % some vertical space between subfigures a/b and c/d...
\begin{subfigure}{0.45\textwidth}
\includegraphics[width=\linewidth]{third}
\caption{}
\end{subfigure}
\hfill
\begin{subfigure}{0.45\textwidth}
\includegraphics[width=\linewidth]{fourth}
\caption{}
\end{subfigure}
\end{minipage}
\hfill
\begin{subfigure}{0.33\textwidth}
\includegraphics[width=\linewidth,height=2\linewidth]{fifth}
\caption{}
\end{subfigure}
\end{figure}
\end{document}
subfigureenvironment, defined insubcaption. – Bernard Jul 12 '16 at 20:10